Generation of Ion Nano-Beams with a Gas Field Ion Source

S. Kalbitzer

Generation of Ion Nano-Beams with a Gas Field Ion Source

S. Kalbitzer *

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Generation of Ion Nano-Beams with a Gas Field Ion Source

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Abstract

With the advent of the super-tip gas field ion source very favourable conditions for generating ion nano-beams have been provided. The basic physical principles for this kind of source are described As a consequence of a very small source emittance of ε ~ 10 -24 m 2 sr ultrabright rare gas ion beams of about 10 16 A/m 2 .sr can be produced. As a further consequence, very narrow probe sizes are obtainable, of d p < 1 nm, with spatial resolutions far below the classical limits of light-optics and even below the novel stimulated-emission-depletion microscopy [STED (microscopy) = stimulated emission depletion (microscopy)] Th. A. Klar, S. W. Hell, Opt. Lett. 24 (1999) 954-956]. Various ion-nanobeam applications are envisaged.

References

7 Cites in Article

Reference Format

1. J Ward,R Seliger (1981). Unknown Title. Vac. Sci. Technol, 19, 1082.
2. P Schwoebel,G Hanson (1985). Beam current stability from localized emission sites in a field ion source. J.Vac.Sci. Technol. B, 3, 214-219.
3. B Ward,John Notte,N Economou (2006). Helium ion microscope: A new tool for nanoscale microscopy and metrology. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 24(6), 2871-2874.
4. Alfred Benninghoven,Birgit Hagenhoff,Ewald Niehuis (1993). Surface MS: Probing Real-World Samples. Analytical Chemistry, 65(14), 630A-640A.
5. Alfred Benninghoven,Birgit Hagenhoff,Ewald Niehuis (1993). Surface MS: probing real-world samples. Analytical Chemistry, 65(14), 630A-640A.
6. S Kalbitzer,V Zhukov (2012). The Development of Ion Nano-beams - A Review. Applied Physics Research, 4(1), 211-221.
7. Iv Unknown Title.

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Funding

No external funding was declared for this work.

Conflict of Interest

The authors declare no conflict of interest.

Ethical Approval

No ethics committee approval was required for this article type.

Data Availability

Not applicable for this article.

How to Cite This Article

S. Kalbitzer. 1970. "Generation of Ion Nano-Beams with a Gas Field Ion Source". Global Journal of Science Frontier Research - E: Marine Science GJSFR-E Volume 13 (GJSFR Volume 13 Issue E2).

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GJSFR Volume 13 Issue E2

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Journal Specifications

Crossref Journal DOI 10.17406/GJSFR

Print ISSN 0975-5896

e-ISSN 2249-4626

Keywords

gas field ion source ion nano beam

Classification

GJSFR-E Classification FOR Code: 030199

Submission ReceivedJuly 17, 2013
Peer Review Double Blind
Handling Editor
Accepted August 11, 2013
Published August 25, 2013

Version of record

v1.2

Language

English

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Article Matrices

Total Score: 112

Country: Germany

Subject: Global Journal of Science Frontier Research - E: Marine Science

Authors: S. Kalbitzer, V.A.Zhukov (PhD/Dr. count: 0)

View Count (all-time): 343

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Total Downloads (simulated): 404

Publish Date: 2013 08, Sun

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Total Views: 5K

Total Downloads: 404

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