Stresses Relaxation Mechanism in the Si-SiO2 System and its Influence on the Interface Properties

Stresses Relaxation Mechanism in the Si-SiO2 System and its Influence on the Interface Properties

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Stresses Relaxation Mechanism in the Si-SiO2 System and its Influence on the Interface Properties

Daniel Kropman Tallinn University

TAnu Laas

Viktor Seeman

Artur Medvids

DOI

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Abstract

The results of the investigation of stresses relaxation by strain by means of EPR spectra, IR absorption spectra, SEM and samples deflection are presented. It has been shown that stresses relaxation mechanism depended on the oxidation condition: temperature, cooling rate, oxide thickness. In the Si-SiO2-Si3N4 system the stresses relaxation by the strain occur due to the opposite sign of the thermal expansion coefficient of Si-SiO2 and Si3N4 on Si. Laser irradiation allows to modify the system stresses.

Stresses Relaxation Mechanism in the Si-SiO2 System and its Influence on the Interface Properties

Authors

Daniel Kropman Tallinn University

TAnu Laas

Viktor Seeman

Artur Medvids

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How to Cite

Daniel Kropman. 2017. “. Global Journal of Science Frontier Research – B: Chemistry GJSFR-B Volume 17 (GJSFR Volume 17 Issue B1): .

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Journal Specifications

Crossref Journal DOI 10.17406/GJSFR

Print ISSN 0975-5896

e-ISSN 2249-4626

GJSFR Volume 17 Issue B1
Pg. 1- 5

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Classification

GJSFR-B Classification: FOR Code: 030599

Submission Received January 28, 2017
Accepted February 24, 2017
Published March 10, 2017

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Article Matrices

Total Score: 104

Country: Estonia

Subject: Global Journal of Science Frontier Research - B: Chemistry

Authors: Daniel Kropman, TAnu Laas, Viktor Seeman, Artur Medvids (PhD/Dr. count: 0)

View Count (all-time): 97

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Publish Date: 2017 05, Tue

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Total Views: 3332

Total Downloads: 1822

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