Using the Effect of Mechanical Stress on Doped Silicon as an Angular Movement Sensor for MOEMS/MEMS Micro Mirrors

Using the Effect of Mechanical Stress on Doped Silicon as an Angular Movement Sensor for MOEMS/MEMS Micro Mirrors

D. Berko

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Y.S. Diamand

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Tel Aviv University

Using the Effect of Mechanical Stress on Doped Silicon as an Angular Movement Sensor for MOEMS/MEMS Micro Mirrors

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References

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Funding

No external funding was declared for this work.

Conflict of Interest

The authors declare no conflict of interest.

Ethical Approval

No ethics committee approval was required for this article type.

Data Availability

Not applicable for this article.

How to Cite This Article

D. Berko. 2014. \u201cUsing the Effect of Mechanical Stress on Doped Silicon as an Angular Movement Sensor for MOEMS/MEMS Micro Mirrors\u201d. Global Journal of Research in Engineering - F: Electrical & Electronic GJRE-F Volume 14 (GJRE Volume 14 Issue F5): .

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GJRE Volume 14 Issue F5
Pg. 15- 18

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Journal Specifications

Crossref Journal DOI 10.17406/gjre

Print ISSN 0975-5861

e-ISSN 2249-4596

Keywords

an analog value thus creating a strain gage built in the MOEMS device surface

Submission ReceivedDecember 7, 2013
Peer Review Double Blind
Handling Editor
Accepted January 5, 2014
Published January 15, 2014

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v1.2

Issue date

August 4, 2014

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Article Matrices

Total Score: 102

Country: Israel

Subject: Global Journal of Research in Engineering - F: Electrical & Electronic

Authors: D. Berko , Y.S. Diamand (PhD/Dr. count: 0)

View Count (all-time): 204

Total Views (Real + Logic): 4660

Total Downloads (simulated): 2213

Publish Date: 2014 08, Mon

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Total Views: 4660

Total Downloads: 2213

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