In this research we describe the preparation of polyimide with pyromellitic dianhydride (PMDA) and p-phenylene diamine (PDA) thin films by physical vapor deposition. For this study, FTIR Spectrometer has been used to measure the effect of imidization temperature on the chemical structure of vapor-deposited thin films of the aromatic PI. When temperature increases, a general increase in all the absorption peaks is observed. This suggests that residual PAA monomers continue to be converted into PI. The surface topology of the PI films was further examined by using AFM atomic force microscopy as a function of the imidization temperature at 150,200,250oC for 1 hour each, it can be clearly seen that the surface became rougher with increasing imidization temperature. The thermal stability of polyimide was also improved by using Thermo gravimetric analysis (TGA).